RTP Tube Furnace NBD-HR1200-110T-170 Introduction
RTP（Rapid Thermal Processing Furnace), patent product, rising speed rate up to 500℃/S. And at the end of the sintering process, the sample is taken out at high temperature directly, to achieve the fastest cooling in the physical state.
The chamber adopts a unique intake structure, The inner tube is gas inlet, the outer tube is gas outlet.This kind structure make reaction atmosphere exposed in the processing sample fully and Constantly
It is perfect helper for growing large-size two-dimensional graphene by CVD method.
Temperature measurement devices contact with the sample directly. it ensure the accuracy of the sample temperature.
RTP Tube Furnace NBD-HR1200-110T-170Application
- RTA;
- Graphene and other vapor deposition, epitaxial growth of carbon nanotubes, etc.
- RTO; RTN;
- Silicidation;
- Diffusion
- Implant Annealing
- Contact Alloying
- Crystallization and Densification
RTP Tube Furnace NBD-HR1200-110T-170 main features
- Max speed of temperature rising is 500℃/S, Max speed of temperature decreasing is 100℃/S,
- Double layer tube structure, the sample exposes in the atmosphere much more Constantly.
- Measure the temperature of the sample surface directly, more accuracy
- The chamber moves from one side to another side according to users’ preset, This will meet more lab applications
- rich expansion interface, to meet the needs of various types of tests.
RTP Tube Furnace NBD-HR1200-110T-170 parameter
Model
|
Max temperature
|
Max speed of temp rising
℃/S
|
Tube Diameter
|
Size of wafer processed
|
Length of Heating area
|
Length of Constant temperature zone
|
Size
(mm)
|
Power
|
Weight
| ||
(inner)mm
|
inch
|
(mm)
|
(mm)
|
L
|
H
|
W
|
(Kg)
| ||||
NBD-HR1100-
110IT-170
|
1200℃
|
500
|
103
|
4″
|
200
|
120
|
800
|
540
|
750
|
AC380V
15kw
|
40
|
